@misc{indiciaeff74d1bb1d21,
  title = {Electrochemical Polishing of Chemical Vapor Deposited Niobium Thin Films},
  author = {Zeming Sun and Mingqi Ge and James T. Maniscalco and Victor Arrieta and Shawn R. McNeal and Matthias U. Liepe},
  year = {2023},
  doi = {10.1016/j.tsf.2023.139948},
  url = {https://arxiv.org/abs/2301.00788},
  note = {Source identifier: 2301.00788}
}