@misc{indiciae09150548c856,
  title = {Mechanical scanning probe lithography of perovskites for fabrication of high-Q planar polaritonic cavities},
  author = {N. Glebov and M. Masharin and B. Borodin and P. Alekseev and F. Benimetskiy and S. Makarov and A. Samusev},
  year = {2023},
  doi = {10.1063/5.0142570},
  url = {https://arxiv.org/abs/2301.01016},
  note = {Source identifier: 2301.01016}
}