@misc{indiciae5a85a4bd4c54,
  title = {Ultra-Low-Loss Silicon Nitride Photonics Based on Deposited Films Compatible with Foundries},
  author = {Xingchen Ji and Yoshitomo Okawachi and Andres Gil-Molina and Mateus Corato-Zanarella and Samantha Roberts and Alexander L. Gaeta and Michal Lipson},
  year = {2023},
  doi = {10.1002/lpor.202200544},
  url = {https://arxiv.org/abs/2301.03053},
  note = {Source identifier: 2301.03053}
}