TY  - RPRT
TI  - Ultra-Low-Loss Silicon Nitride Photonics Based on Deposited Films Compatible with Foundries
AU  - Xingchen Ji
AU  - Yoshitomo Okawachi
AU  - Andres Gil-Molina
AU  - Mateus Corato-Zanarella
AU  - Samantha Roberts
AU  - Alexander L. Gaeta
AU  - Michal Lipson
PY  - 2023
DO  - 10.1002/lpor.202200544
UR  - https://arxiv.org/abs/2301.03053
ID  - 2301.03053
ER  -