@misc{indiciaedad3f6962de1,
  title = {Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N\$\_2\$ discharges on experimental timescales},
  author = {Tobias Gergs and Thomas Mussenbrock and Jan Trieschmann},
  year = {2023},
  doi = {10.1088/1361-6463/acc07e},
  url = {https://arxiv.org/abs/2301.03524},
  note = {Source identifier: 2301.03524}
}