TY  - RPRT
TI  - Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N$_2$ discharges on experimental timescales
AU  - Tobias Gergs
AU  - Thomas Mussenbrock
AU  - Jan Trieschmann
PY  - 2023
DO  - 10.1088/1361-6463/acc07e
UR  - https://arxiv.org/abs/2301.03524
ID  - 2301.03524
ER  -