@misc{indiciae0671b9e6e25a,
  title = {Deposition of Ga2O3 thin films by liquid metal target sputtering},
  author = {Martins Zubkins and Viktors Vibornijs and Edvards Strods and Edgars Butanovs and Liga Bikse and Mikael Ottosson and Anders Hallén and Jevgenijs Gabrusenoks and Juris Purans and Andris Azens},
  year = {2023},
  doi = {10.1016/j.vacuum.2022.111789},
  url = {https://arxiv.org/abs/2301.03845},
  note = {Source identifier: 2301.03845}
}