@misc{indiciae18d3dc3b79fc,
  title = {Lower-temperature fabrication of airbridges by grayscale lithography to increase yield of nanowire transmons in circuit QED quantum processors},
  author = {T. Stavenga and L. DiCarlo},
  year = {2023},
  doi = {10.1063/5.0146814},
  url = {https://arxiv.org/abs/2301.04065},
  note = {Source identifier: 2301.04065}
}