TY  - RPRT
TI  - Lower-temperature fabrication of airbridges by grayscale lithography to increase yield of nanowire transmons in circuit QED quantum processors
AU  - T. Stavenga
AU  - L. DiCarlo
PY  - 2023
DO  - 10.1063/5.0146814
UR  - https://arxiv.org/abs/2301.04065
ID  - 2301.04065
ER  -