@misc{indiciaed75ddf3b69fd,
  title = {Cryogenic temperature deposition of high-performance CoFeB/MgO/CoFeB magnetic tunnel junctions on 300 mm wafers},
  author = {Tomohiro Ichinose and Tatsuya Yamamoto and Takayuki Nozaki and Kay Yakushiji and Shingo Tamaru and Makoto Konoto and Shinji Yuasa},
  year = {2023},
  url = {https://arxiv.org/abs/2301.04823},
  note = {Source identifier: 2301.04823}
}