TY  - RPRT
TI  - Cryogenic temperature deposition of high-performance CoFeB/MgO/CoFeB magnetic tunnel junctions on 300 mm wafers
AU  - Tomohiro Ichinose
AU  - Tatsuya Yamamoto
AU  - Takayuki Nozaki
AU  - Kay Yakushiji
AU  - Shingo Tamaru
AU  - Makoto Konoto
AU  - Shinji Yuasa
PY  - 2023
UR  - https://arxiv.org/abs/2301.04823
ID  - 2301.04823
ER  -