@misc{indiciaefddd713829f4,
  title = {Experimental System Identification and Disturbance Observer-based Control for a Monolithic \$Zθ\_\{x\}θ\_\{y\}\$ Precision Positioning System},
  author = {Mohammadali Ghafarian and Bijan Shirinzadeh and Ammar Al-Jodah and Tilok Kumar Das and Tianyao Shen},
  year = {2023},
  url = {https://arxiv.org/abs/2301.05358},
  note = {Source identifier: 2301.05358}
}