TY  - RPRT
TI  - Experimental System Identification and Disturbance Observer-based Control for a Monolithic $Zθ_{x}θ_{y}$ Precision Positioning System
AU  - Mohammadali Ghafarian
AU  - Bijan Shirinzadeh
AU  - Ammar Al-Jodah
AU  - Tilok Kumar Das
AU  - Tianyao Shen
PY  - 2023
UR  - https://arxiv.org/abs/2301.05358
ID  - 2301.05358
ER  -