@misc{indiciaefe60ba428e04,
  title = {Thin-film PMUTs: A Review of 40 Years of Research},
  author = {Kaustav Roy and Joshua En-Yuan Lee and Chengkuo Lee},
  year = {2023},
  url = {https://arxiv.org/abs/2301.05814},
  note = {Source identifier: 2301.05814}
}