TY  - RPRT
TI  - Thin-film PMUTs: A Review of 40 Years of Research
AU  - Kaustav Roy
AU  - Joshua En-Yuan Lee
AU  - Chengkuo Lee
PY  - 2023
UR  - https://arxiv.org/abs/2301.05814
ID  - 2301.05814
ER  -