@misc{indiciae8c5d5cef1b27,
  title = {High-uniformity TiN/Ti/TiN multilayers for the development of Microwave Kinetic Inductance Detector},
  author = {Mario De Lucia and E. Baldwin and G. Ulbricht and J. D. Piercy and O. Creaner and C. Bracken and T. P. Ray},
  year = {2023},
  doi = {10.1117/12.2626867},
  url = {https://arxiv.org/abs/2301.07579},
  note = {Source identifier: 2301.07579}
}