TY  - RPRT
TI  - High-uniformity TiN/Ti/TiN multilayers for the development of Microwave Kinetic Inductance Detector
AU  - Mario De Lucia
AU  - E. Baldwin
AU  - G. Ulbricht
AU  - J. D. Piercy
AU  - O. Creaner
AU  - C. Bracken
AU  - T. P. Ray
PY  - 2023
DO  - 10.1117/12.2626867
UR  - https://arxiv.org/abs/2301.07579
ID  - 2301.07579
ER  -