@misc{indiciae4b59a4bca398,
  title = {Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography},
  author = {Christiaan Bekker and Muhammad Junaid Arshad and Pasquale Cilibrizzi and Charalampos Nikolatos and Peter Lomax and Graham S. Wood and Rebecca Cheung and Wolfgang Knolle and Neil Ross and Brian Gerardot and Cristian Bonato},
  year = {2023},
  doi = {10.1063/5.0144684},
  url = {https://arxiv.org/abs/2301.07705},
  note = {Source identifier: 2301.07705}
}