@misc{indiciae4027e6a04fb3,
  title = {Soft Sensing Regression Model: from Sensor to Wafer Metrology Forecasting},
  author = {Angzhi Fan and Yu Huang and Fei Xu and Sthitie Bom},
  year = {2023},
  doi = {10.3390/s23208363},
  url = {https://arxiv.org/abs/2301.08974},
  note = {Source identifier: 2301.08974}
}