TY  - RPRT
TI  - Soft Sensing Regression Model: from Sensor to Wafer Metrology Forecasting
AU  - Angzhi Fan
AU  - Yu Huang
AU  - Fei Xu
AU  - Sthitie Bom
PY  - 2023
DO  - 10.3390/s23208363
UR  - https://arxiv.org/abs/2301.08974
ID  - 2301.08974
ER  -