TY  - RPRT
TI  - Nanometer-precision surface metrology of millimeter-size stepped objects using full-cascade-linked synthetic-wavelength digital holography using a line-by-line full-mode-extracted optical frequency comb
AU  - Eiji Hase
AU  - Yu Tokizane
AU  - Kazuki Sadahiro
AU  - Takeo Minamikawa
AU  - Isao Morohashi
AU  - Takeshi Yasui
PY  - 2023
DO  - 10.1364/oe.483408
UR  - https://arxiv.org/abs/2301.10476
ID  - 2301.10476
ER  -