@misc{indiciae4d7d1b12e8ce,
  title = {Room-Temperature Sputtered Ultralow-loss Silicon Nitride for Hybrid Photonic Integration},
  author = {Shuangyou Zhang and Toby Bi and Irina Harder and Olga Lohse and Florentina Gannott and Alexander Gumann and Yaojing Zhang and Pascal Del'Haye},
  year = {2023},
  doi = {10.1002/lpor.202300642},
  url = {https://arxiv.org/abs/2301.10758},
  note = {Source identifier: 2301.10758}
}