@misc{indiciae4751adb630f0,
  title = {Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS},
  author = {Jyotish Patidar and Amit Sharma and Siarhei Zhuk and Giacomo Lorenzin and Claudia Cancellieri and Martin F. Sarott and Morgan Trassin and Kerstin Thorwarth and Johann Michler and Sebastian Siol},
  year = {2023},
  url = {https://arxiv.org/abs/2301.11183},
  note = {Source identifier: 2301.11183}
}