TY  - RPRT
TI  - Flux and energy asymmetry in a low pressure capacitively coupled plasma discharge excited by sawtooth-like waveform -- a harmonic study
AU  - Sarveshwar Sharma
AU  - Nishant Sirse
AU  - Miles M Turner
PY  - 2023
DO  - 10.1063/5.0151866
UR  - https://arxiv.org/abs/2302.02409
ID  - 2302.02409
ER  -