@misc{indiciae24c26e614f8d, title = {Argon milling induced decoherence mechanisms in superconducting quantum circuits}, author = {J. Van Damme and Ts. Ivanov and P. Favia and T. Conard and J. Verjauw and R. Acharya and D. Perez Lozano and B. Raes and J. Van de Vondel and A. M. Vadiraj and M. Mongillo and D. Wan and J. De Boeck and A. Potočnik and K. De Greve}, year = {2023}, doi = {10.1103/physrevapplied.20.014034}, url = {https://arxiv.org/abs/2302.03518}, note = {Source identifier: 2302.03518} }