@misc{indiciae400880c8b624,
  title = {Progress toward superconductor electronics fabrication process with planarized NbN and NbN/Nb layers},
  author = {Sergey K. Tolpygo and Justin L. Mallek and Vladimir Bolkhovsky and Ravi Rastogi and Evan B. Golden and Terence J. Weir and Leonard M. Johnson and Mark A. Gouker},
  year = {2023},
  doi = {10.1109/tasc.2023.3246430},
  url = {https://arxiv.org/abs/2302.06830},
  note = {Source identifier: 2302.06830}
}