TY  - RPRT
TI  - Progress toward superconductor electronics fabrication process with planarized NbN and NbN/Nb layers
AU  - Sergey K. Tolpygo
AU  - Justin L. Mallek
AU  - Vladimir Bolkhovsky
AU  - Ravi Rastogi
AU  - Evan B. Golden
AU  - Terence J. Weir
AU  - Leonard M. Johnson
AU  - Mark A. Gouker
PY  - 2023
DO  - 10.1109/tasc.2023.3246430
UR  - https://arxiv.org/abs/2302.06830
ID  - 2302.06830
ER  -