@misc{indiciae050c387b13c6,
  title = {Chemical Mechanical Planarization for Ta-based Superconducting Quantum Devices},
  author = {Ekta Bhatia and Soumen Kar and Jakub Nalaskowski and Tuan Vo and Stephen Olson and Hunter Frost and John Mucci and Brian Martinick and Pui Yee Hung and Ilyssa Wells and Sandra Schujman and Satyavolu S. Papa Rao},
  year = {2023},
  doi = {10.1116/6.0002586},
  url = {https://arxiv.org/abs/2302.07732},
  note = {Source identifier: 2302.07732}
}