@misc{indiciae882cca4c950f,
  title = {Nanoscale Imaging of Super-High-Frequency Microelectromechanical Resonators with Femtometer Sensitivity},
  author = {Daehun Lee and Shahin Jahanbani and Jack Kramer and Ruochen Lu and Keji Lai},
  year = {2023},
  doi = {10.1038/s41467-023-36936-9},
  url = {https://arxiv.org/abs/2302.08004},
  note = {Source identifier: 2302.08004}
}