TY - RPRT TI - Nanoscale Imaging of Super-High-Frequency Microelectromechanical Resonators with Femtometer Sensitivity AU - Daehun Lee AU - Shahin Jahanbani AU - Jack Kramer AU - Ruochen Lu AU - Keji Lai PY - 2023 DO - 10.1038/s41467-023-36936-9 UR - https://arxiv.org/abs/2302.08004 ID - 2302.08004 ER -