@misc{indiciaed22b5a946f22, title = {Initial Fabrication and Characterization of Chemically-Etched Silicon Slits for KOSMOS}, author = {Debby Tran and Sarah Tuttle and Kal Kadlec and Rishi Pahuja and Ali C. Jones and William Ketzeback and Russet McMillan and Amanda Townsend}, year = {2023}, doi = {10.1117/1.jatis.8.4.045004}, url = {https://arxiv.org/abs/2302.08552}, note = {Source identifier: 2302.08552} }