@misc{indiciae7223ab2536a3, title = {SEMI-PointRend: Improved Semiconductor Wafer Defect Classification and Segmentation as Rendering}, author = {MinJin Hwang and Bappaditya Dey and Enrique Dehaerne and Sandip Halder and Young-han Shin}, year = {2023}, doi = {10.1117/12.2657555}, url = {https://arxiv.org/abs/2302.09569}, note = {Source identifier: 2302.09569} }