TY  - RPRT
TI  - Indium-Bond-And-Stop-Etch (IBASE) Technique for Dual-side Processing of Thin High-mobility GaAs/AlGaAs Epitaxial Layers
AU  - Changyun Yoo
AU  - Kenneth W. West
AU  - Loren N. Pfeiffer
AU  - Chris A. Curwen
AU  - Jonathan H. Kawamura
AU  - Boris S. Karasik
AU  - Mark S. Sherwin
PY  - 2023
DO  - 10.1063/5.0147343
UR  - https://arxiv.org/abs/2302.11057
ID  - 2302.11057
ER  -