@misc{indiciae148bfa3c493e,
  title = {Generation of energetic electrons by surface waves in VHF CCPs},
  author = {D. Eremin and E. Kemaneci and M. Matsukuma and I. Kaganovich and T. Mussenbrock and R. P. Brinkmann},
  year = {2023},
  url = {https://arxiv.org/abs/2302.12499},
  note = {Source identifier: 2302.12499}
}