@misc{indiciae94a7be7423f5, title = {Laser nano-fabrication inside silicon with spatial beam modulation and non-local seeding}, author = {Rana Asgari Sabet and Aqiq Ishraq and Alperen Saltik and Onur Tokel}, year = {2023}, url = {https://arxiv.org/abs/2302.13105}, note = {Source identifier: 2302.13105} }