TY  - RPRT
TI  - Laser nano-fabrication inside silicon with spatial beam modulation and non-local seeding
AU  - Rana Asgari Sabet
AU  - Aqiq Ishraq
AU  - Alperen Saltik
AU  - Onur Tokel
PY  - 2023
UR  - https://arxiv.org/abs/2302.13105
ID  - 2302.13105
ER  -