@misc{indiciaea680df32d462, title = {High-speed and wide-field nanoscale table-top ptychographic EUV imaging and beam characterization with a sCMOS detector}, author = {Wilhelm Eschen and Chang Liu and Daniel S. Penagos Molina and Robert Klas and Jens Limpert and Jan Rothhardt}, year = {2023}, doi = {10.1364/oe.485779}, url = {https://arxiv.org/abs/2302.14147}, note = {Source identifier: 2302.14147} }