TY  - RPRT
TI  - High-speed and wide-field nanoscale table-top ptychographic EUV imaging and beam characterization with a sCMOS detector
AU  - Wilhelm Eschen
AU  - Chang Liu
AU  - Daniel S. Penagos Molina
AU  - Robert Klas
AU  - Jens Limpert
AU  - Jan Rothhardt
PY  - 2023
DO  - 10.1364/oe.485779
UR  - https://arxiv.org/abs/2302.14147
ID  - 2302.14147
ER  -