@misc{indiciae0f4aad07d6fe,
  title = {Ultra-high-speed high-resolution laser lithography for lithium niobate integrated photonics},
  author = {Jinming Chen and Zhaoxiang Liu and Lvbin Song and Chao Sun and Guanhua Wang and Ya Cheng},
  year = {2023},
  url = {https://arxiv.org/abs/2303.00166},
  note = {Source identifier: 2303.00166}
}