@misc{indiciae5d6b20165f7e,
  title = {Continuous-Time Modeling and Analysis of Particle Beam Metrology},
  author = {Akshay Agarwal and Minxu Peng and Vivek K. Goyal},
  year = {2023},
  doi = {10.1109/jsait.2023.3283911},
  url = {https://arxiv.org/abs/2303.04100},
  note = {Source identifier: 2303.04100}
}