@misc{indiciaeb4dd2e19ae62, title = {\$β\$-Ga\$\_2\$O\$\_3\$ Trench Schottky Diodes by Novel Low-Damage Ga-Flux Etching}, author = {Sushovan Dhara and Nidhin Kurian Kalarickal and Ashok Dheenan and Sheikh Ifatur Rahman and Chandan Joishi and Siddharth Rajan}, year = {2023}, doi = {10.1063/5.0151808}, url = {https://arxiv.org/abs/2303.04870}, note = {Source identifier: 2303.04870} }