TY  - RPRT
TI  - $β$-Ga$_2$O$_3$ Trench Schottky Diodes by Novel Low-Damage Ga-Flux Etching
AU  - Sushovan Dhara
AU  - Nidhin Kurian Kalarickal
AU  - Ashok Dheenan
AU  - Sheikh Ifatur Rahman
AU  - Chandan Joishi
AU  - Siddharth Rajan
PY  - 2023
DO  - 10.1063/5.0151808
UR  - https://arxiv.org/abs/2303.04870
ID  - 2303.04870
ER  -