@misc{indiciae1c785a0347cc,
  title = {Foundry manufacturing of tight-confinement, dispersion-engineered, ultralow-loss silicon nitride photonic integrated circuit},
  author = {Zhichao Ye and Haiyan Jia and Zhangjun Huang and Chen Shen and Jinbao Long and Baoqi Shi and Yi-Han Luo and Lan Gao and Wei Sun and Hairun Guo and Jijun He and Junqiu Liu},
  year = {2023},
  doi = {10.1364/prj.486379},
  url = {https://arxiv.org/abs/2303.05004},
  note = {Source identifier: 2303.05004}
}