@misc{indiciaef1e61338ef09,
  title = {Study of Surface Damage in Silicon by Irradiation with Focused Rubidium Ions},
  author = {S. Xu and Y. Li and M. A. Verheijen and E. R. Kieft and E. J. D. Vredenbregt},
  year = {2023},
  doi = {10.1116/6.0002643},
  url = {https://arxiv.org/abs/2303.09315},
  note = {Source identifier: 2303.09315}
}