@misc{indiciae53be8b0e9fef, title = {AdaOPC: A Self-Adaptive Mask Optimization Framework For Real Design Patterns}, author = {Wenqian Zhao and Xufeng Yao and Ziyang Yu and Guojin Chen and Yuzhe Ma and Bei Yu and Martin D. F. Wong}, year = {2023}, url = {https://arxiv.org/abs/2303.12723}, note = {Source identifier: 2303.12723} }