@misc{indiciaec1fc66a93ed8,
  title = {Reduction of helium permeation in microfabricated cells using aluminosilicate glass substrates and Al\$\_2\$O\$\_3\$ coatings},
  author = {C. Carlé and S. Keshavarzi and A. Mursa and P. Karvinen and R. Chutani and S. Bargiel and S. Queste and R. Vicarini and P. Abbé and M. Abdel Hafiz and V. Maurice and R. Boudot and N. Passilly},
  year = {2023},
  doi = {10.1063/5.0151899},
  url = {https://arxiv.org/abs/2303.13927},
  note = {Source identifier: 2303.13927}
}