TY  - RPRT
TI  - Controlling the Density of Plasma Species in Ar/CF4 Radiofrequency Capacitively Coupled Plasma Discharges
AU  - M. G. Elsheikh
AU  - Y. Abdella
AU  - T. El-Ashram
AU  - W. M. Moslem
AU  - M. Shihab
PY  - 2023
UR  - https://arxiv.org/abs/2303.15089
ID  - 2303.15089
ER  -