@misc{indiciae3ec00ae0521b,
  title = {Thin film aluminum nitride surface acoustic wave resonators for quantum acoustodynamics},
  author = {Wenbing Jiang and Junfeng Chen and Xiaoyu Liu and Zhengqi Niu and Kuang Liu and Wei Peng and Zhen Wang and Zhi-Rong Lin},
  year = {2023},
  doi = {10.1063/5.0158083},
  url = {https://arxiv.org/abs/2304.00511},
  note = {Source identifier: 2304.00511}
}