@misc{indiciaea25e9d0d663c,
  title = {Low-loss Si-based Dielectrics for High Frequency Components of Superconducting Detectors},
  author = {M. Lisovenko and Z. Pan and P. S. Barry and T. Cecil and C. L. Chang and R. Gualtieri and J. Li and V. Novosad and G. Wang and V. Yefremenko},
  year = {2023},
  doi = {10.1109/tasc.2023.3264174},
  url = {https://arxiv.org/abs/2304.01362},
  note = {Source identifier: 2304.01362}
}