@misc{indiciae37a6070e8dd9,
  title = {Development of 15kA/cm\$\textasciicircum{}2\$ Fabrication Process for Superconducting Integrated Digital Circuits},
  author = {Liliang Ying and Xue Zhang and Guixiang He and Weifeng Shi and Hui Xie and Linxian Ma and Hui Zhang and Jie Ren and Wei Peng and Zhen Wang},
  year = {2023},
  url = {https://arxiv.org/abs/2304.01588},
  note = {Source identifier: 2304.01588}
}